Pay in 4 interest-free payments of $28.88 Learn more
Ships within 48 hours · Estimated delivery Sep 19 - Sep 24
NOTICE: This document is no longer published with the SEMI E54 suite of standards
This Specification defines standards that facilitate the host’s knowledge and role in automated and manual reticle pod transfers
1 SECS-II defines the method of conveying information between equipment and host in the form of messages
This Specification defines dimensional requirements for the load port of frame cassette for 300 mm wafer in backend process equipment
SEMI E81 — Provisional Specification for CIM Framework Domain
E11700 - SEMI E117 - レチクルロードポートの仕様 StdVol-Safety Guidelines NOTICE: This document is noglobal Physical Interfaces and Carriers Committee2010430global Audits and Reviews Subcommittee20106www. semi. org200211200411 RSP Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E19. 3 Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E72 Specification and Guide for 300 mm Equipment
US$ 110.00
US$ 75.00
US$ 90.00
US$ 38.00
US$ 25.00
US$ 38.00
US$ 38.00
US$ 38.00